熱質式流量計
規格說明
Name |
Thermal Mass Flow Meter |
Fluids |
Non-corrosive Gas |
Display |
LCD display with blue backlight |
Flow Range |
0~10 SCCM to 0~100 SLM |
Process Connection |
1”NPT female / Flange |
Output Signal |
0~5V / 4~20mA |
Load Resistance |
0~5V - 1000Ω 4~20mA - 500Ω |
Material |
Wetted Part - SS316 O-ring - Viton |
Accuracy |
±2%FS |
Repeatability |
±0.15%FS or better |
Turndown Ratio |
100:1 |
Input Power |
24VDC / 15VDC / 115VAC / 220VAC |
Electric Connection |
9 Pin Sub D |
Minimum Pressure |
100”H2O |
Maximum Pressure |
500 PSIG |
Temperature Range |
0~50℃ |
Response Time |
1 second |
Temp. Coefficient |
0.05%FS per 1℃ or better |
Pressure Coefficient |
0.01%FS per PSIG or better |
Certification |
CE |
Explosion Proof |
Class I, Groups B, C & D Class II, Groups E, F & G; NEMA 4, 7, 9 ATEX II 2G Ex d IIB + H2 Gb ATEX II 2G Ex tb IIIC Db IP66 |
Weight |
App. 6.5kg with power supply |